Equipments

WINFAB cleanroom is built on two levels, of about 500 m² each. At the ground level, the space is shared between facilities (HVAC, DI-water production, gas lines,vacuum pumps, storage...), packaging area (dicing, wire-bonding) and some back-end tools (wafer grinder, CMP...). Ion implanter is also located on the ground floor.

Most of the process steps are carried out at the first floor, where the clean environment (ISO 5) contributes to a flawless fabrication process. In the ballroom cleanroom environment, the equipments are clustered according to thematic process steps (wetbenches area, furnaces area, plasma area...).